R&D for next-generation precision part solutions in semiconductor wet-clean processes

Advanced R&D Solutions for Semiconductor Parts

HS HI-TECH

Custom precision machining solutions for higher yield. Proven OEM, ODM and reverse engineering capability makes us the partner that maximises the reliability of semiconductor equipment parts.

  1. Wafer Rotation Control

    A precision-machined wafer rotation chuck module

    Precision wafer rotation technology

    Chemical, heat and cleanliness are designed and built in house. We were the first in the industry to apply insert moulding, holding form and precision even under rotation.

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  2. Chemical Micro-Control

    Droplets falling in an even line from a nozzle

    Precision delivery of cleaning chemicals

    Frequency control governs droplet size and velocity. This sits alongside ultra-fine laser drilling (Quartz, PEEK) and fluoropolymer bonding (ultrasonic, MVD).

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  3. Temperature Control

    Heat rising from an LED array into a wafer

    Wafer heating and temperature control

    Wafers are heated past 350℃ with centre-to-edge uniformity held within ±3%. Real-time zone feedback control, circuit design and functional testing all run in house.

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  4. Material Platform

    Conductive fluoropolymer pellets fed into a moulding machine

    Conductive fluoropolymer

    ICP-MS analysis confirms high purity with metal ions under 100 ppb. Carbon brings conductivity below 10³, and the compound stays mouldable to MFR spec.

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IN-HOUSE
process

From R&D and design through machining, assembly, quality verification and delivery, every step runs on our in-house system. Integrated process infrastructure delivers rigorous quality assurance and the best lead time.

  1. Development

    DEVELOPMENT

  2. Process

    PROCESS

  3. Machining

    MANUFACTURING

  4. Assembly

    ASSEMBLY

  5. Quality

    QUALITY

  6. Delivery

    DELIVERY

REVERSE ENGINEERING
process

A reverse-engineering process built on precision 3D measurement and material analysis. Design review, manufacturing and quality verification run one-stop in house, giving a perfect restoration of ultra-fine process parts on the best lead time.

  1. Enquiry received

    [Sales]

  2. Design review

    [R&D]

  3. Process design and quality criteria

    [Production / Process eng.]

  4. Assembly and production

    [Manufacturing]

  5. Inspection and certificate

    [Quality]

  6. Delivered to the customer

    [Sales]

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