HS HI-TECH - Semiconductor Wet-Clean Precision Parts

New value in semiconductors, built by ultra-precision technology

End-to-end precision process solutions and outstanding equipment technology set a new standard for the global semiconductor industry.

Core Process Kit solutions for wet-clean

Spin Chuck · Nozzle · LED Heating System · Chamber Parts. We cover 300mm and 200mm wafer process parts from new precision builds to reverse-engineering and repair solutions.

A spin chuck and bowl holding a wafer inside a wet-clean chamber, with the nozzle arm above

Ultra-Uniform Droplet Control

Uniform droplets of 30μm or less are dispensed within a 2% standard deviation, raising the stability and yield of precision cleaning processes.

Droplets of equal size falling in evenly spaced lines from a dispensing head

In-house production based on a cleanroom

Precision assembly runs in a Class 10,000 cleanroom environment. Quality traceability data across every step, built on HI-Q / ARI System, backs the distinctive inspection certificate we issue.

An operator in a cleanroom gown inspecting through a microscope beside process monitors

We are looking for people to build with

Not perfect people - good people. We want to work with those who share the direction of change and keep pace with it.

Four colleagues in work jackets looking at a tablet together on the shop floor

Our products

Four core parts for the wet-clean process, made in house from design through machining, assembly and inspection.

LED Heating System
Heating the wafer with light
Twelve individually controlled channels hold uniformity within ±3% and reach up to 400℃.
- See LED Heating System
MC-PFA
Carbon PFA you can injection mould
High-purity PFA combined with the conductivity of carbon and injection mouldability. Forming instead of cutting reduces material loss, and no metal ions were detected after SPM immersion.
- See MC-PFA
Spin Chuck
Holding its shape in a corrosive environment
The chuck that holds the wafer on 300 mm and 200 mm lines. 45℃ to 220℃, twelve chemicals.
- See Spin Chuck
Chamber Parts
Plastic components inside the cleaning chamber
Our engineering-plastic machining covers bowls, vats, chemical tanks, dampers and other cleaning-chamber components. Material loss is kept to a minimum, which keeps the price reasonable.
- See Chamber Parts